Artech房子

文摘:如果你没有接触过MEMS(微机电系统)技术，或者有使用MEMS设备的理由，那么你可能想知道这些大惊小怪的是什么。MEMS是什么?MEMS和MST(微系统技术)有什么区别?与现有技术相比，新技术有什么优势?如果你曾经发现自己在思考这样的问题，那么这本书可能适合你。正如标题所示，主要目的是通过描述可用的工艺和材料以及使用商用设备的示例来介绍MEMS。目标读者是那些热衷于了解MEMS但很少或没有技术经验的技术经理、工程师、科学家和研究生。我特别高兴地注意到，Maluf用了整整一章的篇幅来阐述包装的重要(通常也是困难的)领域。前三章提供了该技术的总体概述。在前三页中，我们被介绍了MEMS与MST的问题，只是为了发现差异取决于你住在哪里!必威体育BW The United States prefer MEMS, while the Europeans use the handle MST. (Note to self: tell colleagues in MEMS group at Southampton). A good account is given of the basic materials used in the technology, including silicon, silicon oxide/nitride/carbide, metals, polymers, quartz and gallium arsenide. The various processes involved in the creation of MEMS devices are also described. A good treatment is given to etching and bonding in addition to the various deposition techniques. It was interesting to note that the author doesn't make a big issue of the differences between bulk and surface micromachined devices; the approach seems to be `here's your toolbag - get on with it'. One of the great strengths of this book is the coverage of commercial MEMS structures. Arising as they have, from essentially a planar technology, MEMS devices are often elaborate three-dimensional creations, and 2D drawings don't do them much justice. I have to say that I was extremely impressed with the many aesthetic isometric views of some of these wonderful structures. Pressure sensors, inkjet print nozzles, mass flow sensors, accelerometers, valves and micromirrors are all given sufficient treatment to describe the fundamental behaviour and design philosophy, but without the mathematical rigour expected for a traditional journal paper. Chapter 5 addresses the promise of the technology as a means of enabling a new range of applications. The concept of using MEMS devices as key elements within complex systems (or even microsystems!) is explored. The so-called `lab-on-a-chip' approach is described, whereby complex analytical systems are integrated onto a single chip together with the associated micropumps and microvalves. The design and fabrication of MEMS devices are important issues by themselves. A key area, often overlooked, is that of packaging. Painstaking modelling and intricate fabrication methodologies can produce resonator structures oscillating at precisely, say, 125 kHz. The device is then mounted in a dual-in-line carrier and the frequency shifts by 10 kHz because of the additional internal stresses produced. Packaging issues can't be decoupled from those of the micromachined components. Many of these issues, such as protective coatings, thermal management, calibration etc, are covered briefly in the final chapter. Overall, I found this book informative and interesting. It has a broad appeal and gives a good insight into this fascinating and exciting subject area. Neil White

文摘:这本书的目的是提出的原理，仪器设计和应用现有的磁换能器。为了完成这一任务，作者从一个基本章节开始，重点是现象学磁性，单位和传感器规格。这本书继续奉献了一个完整的章节，每个磁传感器家族:感应，磁通门，磁敏电阻，霍尔效应，磁光，共振，鱿鱼和其他原理。最后有三章关于非磁性变量的应用、测试、校准和磁传感器。不同的作者对一些章节做出了贡献。尽管如此，全书的内容、表述、观点和符号都是一致的。此外，每一章都可以单独阅读而不会失去其范围。作者(们)关注的是由商业或公共机构开发或正在原型化的设备。本书的目标还包括深入了解特定应用的传感器设计属性，并了解特定传感器的局限性和/或适用性。因此，每一章都附有广泛的科学和技术材料清单，为有兴趣进一步阅读的人提供了很好的参考。 There are a number of books treating magnetic materials and their applications. However, often only a fundamental point of view is given. Magnetic Sensors and Magnetometers is a comprehensive book on the practice of magnetic transducers and their bases with many contributions from different experts in this field. Indeed, many professionals and researchers have (or will have) the need at some point for a magnetic sensor or transducer, and therefore a book of this nature is a very good reference for building and designing the most suitable solution for a specific application. It also provides design hints for connecting magnetic sensors to electronic devices, such as amplifier noise matching, etc. The book may also be of interest to teachers, students and researchers at universities, to instrumentation and application designers and users and the like. It is appropriate to list and comment on the various chapters for the reader to know what can be found in them: Basics (by Hauser and Ripka with 25 references): magnetic material types and properties and sensor specification. Induction Sensors (by Ripka with 29 refs) describes the air coils and their limitations, coils with ferromagnetic cores, amplifier noise matching, and other induction-based techniques such as rotating, moving, extracting and vibrating coils. Fluxgate Sensors (by Ripka with 159 refs) presents the principle of the transducer with different sensor geometries. Several aspects of this widely used type of sensor are discussed in more detail: demagnetization, core materials, second-harmonic analogue magnetometer, nonselective detection, short-circuited or current-output, noise and offset stability. Also, different design applications are described. Magnetoresistors (by Hauser and Tondra with 32 refs) illustrates the sensors and applications of the anisotropic magnetoresistance effect utilized in thin films and the giant magnetoresistance phenomenon. Hall-effect Magnetic Sensors (by Popovic et al with 51 refs) describes the basic sensor and thin-film Hall elements. Furthermore, integrated and multi-axes Hall sensors are presented. Magneto-optical Sensors (by Didosyan and Hauser with 33 refs) with the Faraday and Kerr effects and a description of the magneto-optical current transformer. Resonance Magnetometers (by Primdahl with 52 refs) describes the proton precession and the Overhauser variant effects and the optically pumped magnetometers. SQUIDs (by Fagaly with 38 refs) illustrates the sensors